This is the inside of one of these valve packages. It is mainly a single layer of etched silicon wafer, with the Ti-Ni thin film applied, a spring, a sapphire ball and a valve seat. Copyright 1999 (c)
This is the inside of one of these valve packages. It is mainly a single layer of etched silicon wafer, with the Ti-Ni thin film applied, a spring, a sapphire ball and a valve seat.
Copyright 1999 (c)
